Method of fabricating micromirror device
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United States of America Patent
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Jan 11, 2011
Issued Date -
N/A
app pub date -
Oct 14, 2008
filing date -
Feb 12, 2003
priority date (Note) -
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Abstract
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
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