Magnetic microvalve using metal ball and method of manufacturing the same
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United States of America Patent
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Nov 19, 2013
Grant Date -
Mar 3, 2011
app pub date -
Aug 31, 2010
filing date -
Sep 1, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
There is provided a magnetic microvalve using a metal ball and a method of manufacturing the same. A magnetic microvalve using a metal ball according to an aspect of the invention may include: an upper substrate having a microchannel serving as a passage through which a fluid moves, a fluid inlet through which the fluid flows into the microchannel, and a fluid outlet through which the fluid, having passed through the microchannel, flows out of the microchannel; a lower substrate having a trench locally provided therein; a PDMS/metal ball combination having a metal ball and PDMS surrounding the metal ball so that the metal ball is located in a central portion thereof, the PDMS/metal ball combination being inserted into the trench provided in the lower substrate; and a magnet located above the microchannel, provided in the upper substrate, and generating magnetic force.
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