Abrasive liquid for metal and method for polishing
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United States of America Patent
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Jul 23, 2013
Grant Date -
Mar 1, 2012
app pub date -
Aug 26, 2011
filing date -
Aug 31, 1998
priority date (Note) -
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Abstract
An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film-forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent in forming a protecting film and (5) water; and a method for polishing.
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