CLEANING APPARATUS, IMPRINT APPARATUS, LITHOGRAPHY APPARATUS, AND CLEANING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200026204A1
SERIAL NO

16454599

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Abstract

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To provide a cleaning apparatus advantageous for cleaning, for example, an original plate used to transfer a pattern to a substrate.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishida, Shingo Utsunomiya-shi, JP 18 89

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