OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME
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United States of America Patent
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Issued Date -
May 6, 2021
app pub date -
Jul 6, 2018
filing date -
Jul 6, 2017
priority date (Note) -
Published
status (Latency Note)
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Abstract
An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.
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