Method of modifying a surface of a body using electromagnetic radiation
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United States of America Patent
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Sep 25, 1990
Grant Date -
N/A
app pub date -
Sep 16, 1988
filing date -
Oct 16, 1987
priority date (Note) -
Expired
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Abstract
A method of modifying a surface of a body such as a semiconductor body is described in which a beam of electromagnetic radiation is directed towards the surface so that the electromagnetic radiation is incident on the surface at or near the Brewster angle, the electromagnetic radiation incident on the surface preferably being so polarised that the electric vector of the electromagnetic radiation lies in the plane of incidence of the electromagnetic radiation at the surface.
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