Dual cathode sputter coating apparatus
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United States of America Patent
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-
Sep 24, 1996
Grant Date -
N/A
app pub date -
Feb 8, 1995
filing date -
Apr 20, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a coating apparatus, a sputter cathode (1) has, directly side by side, two electrodes (2, 3) connected in common to a high-frequency generator and having each a target (9, 10). The targets (9, 10) of both electrodes (2, 3) abut one another each with a straight edge (11, 12). A dark space shield surrounds both electrodes (2, 3) and targets (9, 10) together.
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