Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
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United States of America Patent
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Sep 24, 1996
Issued Date -
N/A
app pub date -
May 23, 1994
filing date -
May 25, 1993
priority date (Note) -
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Abstract
The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will excite the flexible member into a characteristic resonance which when read optically gives indication of certain physical phenomena influencing the surface or material of interest. The microstructures of the present invention may be configured to self-resonate, as a so-called active device, under certain conditions. Many different physical phenomena may be quantified using the device of the present invention.
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