Polymer chuck with heater and method of manufacture
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 25, 2000
Grant Date -
N/A
app pub date -
Mar 2, 1999
filing date -
Mar 2, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic chuck 20 for holding a substrate 25 in a process chamber 30 comprises an electrostatic member 115 comprising a polymer 120 covering an electrode 125, the polymer 120 having a receiving surface 135 for receiving the substrate 25. A heater 130 abutting the polymer 120 is provided to heat the substrate 25 during processing of the substrate 25. The heater 130 has a resistance that is sufficiently low to heat the substrate 25 without causing excessive thermal degradation of the polymer 120.
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