Electrostatic chuck having heater and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 25, 2003
Grant Date -
N/A
app pub date -
Nov 5, 2001
filing date -
Nov 5, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic chuck 55 for holding a substrate 30 comprises an electrostatic member 100 made from a dielectric 115 covering an electrode 105 that is chargeable to electrostatically hold the substrate 30. A base 175 that includes a heater 235 is joined to the electrostatic member 100. The base may be made from a composite material, such as a porous ceramic infiltrated with the metal, and may be joined to the electrostatic member by a bond layer.
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Cited Art Landscape
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