Process for treating fluorine compound-containing gas

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United States of America Patent

PATENT NO 6855305
SERIAL NO

10677961

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Abstract

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A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200.degree.-800.degree. C., to convert the fluorine of the fluorine compound to hydrogen fluoride.

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Patent Owner(s)

  • SHOWA DENKO K.K.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arato, Toshiaki Hitachinaka, JP 16 149
Azuhata, Shigeru Hitachi, JP 47 949
Ikeda, Shinzo Naka-gun, JP 12 126
Irie, Kazuyoshi Hitachi, JP 16 79
Kanno, Shuichi Hitachi, JP 33 177
Tamata, Shin Higashiibaraki-gun, JP 50 319
Yamashita, Hisao Hitachi, JP 54 655
Yasuda, Ken Tokyo, JP 18 117

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