Phase change material memory device
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United States of America Patent
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-
Jan 15, 2008
Grant Date -
May 1, 2003
app pub date -
Oct 30, 2001
filing date -
Oct 30, 2001
priority date (Note) -
In Force
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Abstract
A lower electrode may be covered by a protective film to reduce the exposure of the lower electrode to subsequent processing steps or the open environment. As a result, materials that may have advantageous properties as lower electrodes may be utilized despite the fact that they may be sensitive to subsequent processing steps or the open environment.
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