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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kaushal, Tony S	Cupertino, US	21	815
Kumar, Ananda H	Fremont, US	120	3509
Wang, You	Cupertino, US	91	1390

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 02, 2010	US,7670688,B2   US7670688B2	GRANTED PATENT AS SECOND PUBLICATION
February 19, 2004	US,20040033385,A1   US20040033385A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7670688

Erosion-resistant components for plasma process chambers

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