Substrate support
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United States of America Patent
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Jun 15, 2010
Grant Date -
Mar 24, 2005
app pub date -
Nov 16, 2004
filing date -
Feb 22, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate thereto. A first pushing member is radially coupled to the first body and adapted to urge the substrate in a first direction parallel to the support plate when the first body rotates. In another aspect, a load lock chamber having a substrate support that supports a substrate placed thereon includes a cooling plate that is moved to actuate at least one alignment mechanism. The alignment mechanism includes a pushing member that urges the substrate in a first direction towards a center of the support. The pushing member may additionally rotate about an axis perpendicular to the first direction.
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