Illumination system coherence remover with a series of partially reflective surfaces

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8159651
APP PUB NO 20090168072A1
SERIAL NO

12328204

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A coherence remover includes a first partially reflective surface and a second partially reflective surface. The coherence remover is configured to receive an input beam. Each of the first and second reflective surfaces is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.

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Patent Owner(s)

  • ASML HOLDING N.V.;ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Coston, Scott D New Milford, US 9 37
Joobeur, Adel Milford, US 16 127
Klinkhamer, Jacob Fredrik Friso Delft, NL 13 43
Ryzhikov, Lev Norwalk, US 41 715
Shmarev, Yevgeniy Lagrangeville, US 2 5
Vink, Rob Delft, NL 2 5
Visser, Huibert Zevenhuizen, NL 31 616

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