Substrate support bushing
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 10, 2012
Grant Date -
Oct 6, 2005
app pub date -
Jan 27, 2005
filing date -
Feb 12, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
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