Storage device with composite spacer and method for manufacturing the same

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United States of America Patent

PATENT NO 9806254
SERIAL NO

14740101

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Abstract

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A storage device includes a first electrode, a second electrode, a storage element, a spacer and a barrier structure. The second electrode is opposite to the first electrode. The storage element is disposed between the first electrode and the second electrode. The spacer is formed on a sidewall of the second electrode, and the spacer has a notch positioned on a top surface of the spacer. The barrier structure is embedded in a lateral of the spacer, and the barrier structure has a top extending upwards past a bottom of the notch. In addition, a method of manufacturing the storage device is disclosed as well.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Chern-Yow Chu Bei, TW 134 727
Liu, Shih-Chang Kaohsiung, TW 305 2187
Sung, Fu-Ting Taoyuan, TW 65 393

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