Hafnium or zirconium oxide coating

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United States of America Patent

PATENT NO 9983333
SERIAL NO

14744138

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Abstract

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The invention concerns an optical coating (3, 3′), having a high refractive index and good optical properties (i.e., low absorption and scatter) and limited internal stresses in a spectral range extending from the visible to the near UV range (i.e., up to a wavelength of 220 nm). The coating (3, 3′) according to the invention consists of a hafnium- or zirconium-containing oxide HfxSiyOz or ZrxSiyOz containing an silicon fraction (y) between 1 at. % and 10 at. %, especially between 1.5 at. % and 3 at. %.

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD OPTICS GMBH63755 ALZENAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Scherer, Michael Kahl, DE 75 670

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