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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
EBARA CORPORATION	TOKYO 144-8510

International Classification(s)

• 1509:MACHINE TOOLS, ABRADING AND FOUNDING MACHINERY

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kamimura, Kenji	Tokyo, JP	71	743
Kodera, Kenji	Tokyo, JP	19	161
Miyasawa, Yasuyuki	Tokyo, JP	8	21
Nakanishi, Masayuki	Tokyo, JP	67	956
Yamamoto, Satoru	Tokyo, JP	170	1000

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Dec 11, 2026
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Dec 11, 2030

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: D851141

Pressing member for substrate polishing apparatus

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