Method of forming retaining ring with shaped surface

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11850703
APP PUB NO 20230182261A1
SERIAL NO

18167007

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Importance

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Abstract

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A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allen, Aden Martin Austin, US 10 90
Balagani, Venkata R Gilroy, US 14 297
Chen, Hung Chih Sunnyvale, US 139 1718
De, Lamenie Romain Beau Menlo Park, US 10 85
Doan, Trung T Baoshan Hsinchu, TW 253 13741
Fong, Michael Jon Mill Valley, US 10 90
Garretson, Charles C Monterey, US 43 329
Huey, Sidney P Fremont, US 27 214
Hughes, Kerry F San Jose, US 12 102
Lin, Jian Milpitas, US 231 3204
Lu, Danny Cam Toan San Francisco, US 24 375
McAllister, Douglas R Pleasanton, US 23 165
Meyer, Stacy San Jose, US 21 154
Oh, Jeonghoon Saratoga, US 120 757
Schmidt, Jeffrey P San Jose, US 9 40
Wang, James C Saratoga, US 53 3076
Wohlert, Martin S San Jose, US 18 140
Zuniga, Steven M Soquel, US 189 2552

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