Position detector and autofocus control apparatus using focal point deviation detector
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United States of America Patent
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Oct 6, 2015
Grant Date -
Aug 22, 2013
app pub date -
Feb 22, 2013
filing date -
Feb 22, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An autofocus control apparatus includes a beam splitter, a condenser lens and a detector. The beam splitter directs light beams from a light source toward a sample and passes light beams reflected from the sample to the condenser lens. The condenser lens condenses the light beams, and the detector detects a focal point deviation of the sample relative to a focal point of the condenser lens. The focal point deviation is detected based on an intersection of a focal line passing through different focal points of the condenser lens and a light receiving plane configured to receive the light beams passing through the condenser lens.
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