Method for multiple irradiation of a resist

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8227177
APP PUB NO 20070264595A1
SERIAL NO

11746909

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The invention relates to a method with contrast reversal which, inter alia, opens up new areas of application for resists.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Kang-Hoon Dresden, DE 3 10
Elian, Klaus Bubenreuth, DE 101 1480
Hohle, Christoph Bubenreuth, DE 18 263
Kretz, Johannes Dresden, DE 14 268
Thrum, Frank Ottobrunn, DE 1 0

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jan 24, 2024
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00