System for the detection of macrodefects
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United States of America Patent
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-
Sep 4, 2007
Grant Date -
May 12, 2005
app pub date -
Nov 2, 2004
filing date -
Nov 6, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A system for the detection of macrodefects is disclosed, the system being surrounded by a housing (50) and being subdivided into a first segment (6), a second segment (8), and a third segment (10). Provided in the second segment (8) is a stage (2), displaceable in the X direction and Y direction, on which a wafer (25) is placed. Located in the first segment (6) is an aspiration device (36) that directs aspirated air via an air guide (37) into the second segment (8), the air guide (37) encompassing several air-directing panels (38) so that an air flow (60) is guided in parallel fashion over the wafer (25).
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