Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate
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United States of America Patent
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Jan 8, 2008
Grant Date -
May 3, 2007
app pub date -
Oct 28, 2005
filing date -
Oct 28, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.
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